Combinatorial sputtering in planetary type systems for alloy libraries with perpendicular gradients of layer thickness and composition realised by a timing approach

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dc.contributor.author Kleiner, Reinhold
dc.contributor.author Kölle, Dieter
dc.contributor.author Goldobin, Edward
dc.contributor.author Sickinger, Hanna Sabine
dc.date.accessioned 2014-09-11T10:15:16Z
dc.date.available 2014-09-11T10:15:16Z
dc.date.issued 2014
dc.identifier.issn 0947-8396
dc.identifier.uri http://hdl.handle.net/10900/56173
dc.language.iso en de_DE
dc.publisher Springer de_DE
dc.relation.uri http://dx.doi.org/10.1007/s00339-013-8100-x de_DE
dc.rights info:eu-repo/semantics/closedAccess
dc.subject.ddc 530 de_DE
dc.subject.ddc 600 de_DE
dc.title Combinatorial sputtering in planetary type systems for alloy libraries with perpendicular gradients of layer thickness and composition realised by a timing approach de_DE
dc.type Article de_DE
utue.quellen.id 20140813180100_00078 de_DE
utue.publikation.seiten 229-232 de_DE
utue.personen.roh Ruppelt, N.
utue.personen.roh Vavra, O.
utue.personen.roh Sickinger, H.
utue.personen.roh Goldobin, E.
utue.personen.roh Koelle, D.
utue.personen.roh Kleiner, R.
utue.personen.roh Kohlstedt, H.
dcterms.isPartOf.ZSTitelID Applied Physics A - Materials Science & Processing de_DE
dcterms.isPartOf.ZS-Issue 1 de_DE
dcterms.isPartOf.ZS-Volume 116 de_DE
utue.fakultaet 07 Mathematisch-Naturwissenschaftliche Fakultät de_DE


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