Combinatorial sputtering in planetary type systems for alloy libraries with perpendicular gradients of layer thickness and composition realised by a timing approach

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Combinatorial sputtering in planetary type systems for alloy libraries with perpendicular gradients of layer thickness and composition realised by a timing approach

Author: Ruppelt, N.; Vavra, O.; Sickinger, H.; Goldobin, E.; Koelle, D.; Kleiner, R.; Kohlstedt, H.
Tübinger Autor(en):
Kleiner, Reinhold
Kölle, Dieter
Goldobin, Edward
Sickinger, Hanna Sabine
Published in: Applied Physics A - Materials Science & Processing (2014), Bd. 116, H. 1, S. 229-232
Verlagsangabe: Springer
Language: English
Full text: http://dx.doi.org/10.1007/s00339-013-8100-x
ISSN: 0947-8396
DDC Classifikation: 530 - Physics
600 - Technology
Dokumentart: Article
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