Combinatorial sputtering in planetary type systems for alloy libraries with perpendicular gradients of layer thickness and composition realised by a timing approach
Author:
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Ruppelt, N.; Vavra, O.; Sickinger, H.; Goldobin, E.; Koelle, D.; Kleiner, R.; Kohlstedt, H.
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Tübinger Autor(en):
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Published in:
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Applied Physics A - Materials Science & Processing
(2014), Bd.
116,
H.
1,
S.
229-232
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Verlagsangabe:
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Springer
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Language:
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English
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Full text:
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http://dx.doi.org/10.1007/s00339-013-8100-x
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ISSN:
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0947-8396
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DDC Classifikation:
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530 - Physics 600 - Technology
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Dokumentart:
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Article
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