A Capacitive Humidity Sensor Suitable for CMOS Integration

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dc.contributor.author Strutwolf, Jörg de_DE
dc.date.accessioned 2014-02-20T16:12:49Z
dc.date.available 2014-02-20T16:12:49Z
dc.date.issued 2013 de_DE
dc.identifier.issn 1530-437X de_DE
dc.identifier.uri http://hdl.handle.net/10900/41968
dc.language.iso en en
dc.publisher IEEE - Inst Electrical Electronics Engineers Inc de_DE
dc.relation.uri http://dx.doi.org/10.1109/JSEN.2013.2270105 de_DE
dc.rights info:eu-repo/semantics/closedAccess
dc.subject.ddc 600 de_DE
dc.subject.ddc 530 de_DE
dc.title A Capacitive Humidity Sensor Suitable for CMOS Integration de_DE
dc.type Artikel de_DE
utue.quellen.id 20140116051827_00367 de_DE
utue.publikation.seiten 4487-4495 de_DE
utue.personen.roh Saeidi, Nooshin de_DE
utue.personen.roh Strutwolf, Joerg de_DE
utue.personen.roh Marechal, Amandine de_DE
utue.personen.roh Demosthenous, Andreas de_DE
utue.personen.roh Donaldson, Nick de_DE
dcterms.isPartOf.ZSTitelID IEEE Sensors Journal de_DE
dcterms.isPartOf.ZS-Issue 11 de_DE
dcterms.isPartOf.ZS-Volume 13 de_DE
utue.fakultaet 07 Mathematisch-Naturwissenschaftliche Fakultät de_DE


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