A Capacitive Humidity Sensor Suitable for CMOS Integration

DSpace Repository

A Capacitive Humidity Sensor Suitable for CMOS Integration

Author: Saeidi, Nooshin; Strutwolf, Joerg; Marechal, Amandine; Demosthenous, Andreas; Donaldson, Nick
Tübinger Autor(en):
Strutwolf, Jörg
Published in: IEEE Sensors Journal (2013), Bd. 13, H. 11, S. 4487-4495
Verlagsangabe: IEEE - Inst Electrical Electronics Engineers Inc
Language: English
Full text: http://dx.doi.org/10.1109/JSEN.2013.2270105
ISSN: 1530-437X
DDC Classifikation: 600 - Technology
530 - Physics
Dokumentart: Article
Show full item record

This item appears in the following Collection(s)