Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers

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dc.contributor.author Linek, Julian
dc.contributor.author Kleiner, Reinhold
dc.contributor.author Kölle, Dieter
dc.date.accessioned 2021-12-20T15:31:40Z
dc.date.available 2021-12-20T15:31:40Z
dc.date.issued 2021
dc.identifier.issn 2072-666X
dc.identifier.uri http://hdl.handle.net/10900/121926
dc.language.iso en de_DE
dc.publisher Mdpi de_DE
dc.relation.uri http://dx.doi.org/10.3390/mi12040350 de_DE
dc.subject.ddc 530 de_DE
dc.subject.ddc 540 de_DE
dc.subject.ddc 600 de_DE
dc.title Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers de_DE
dc.type Article de_DE
utue.quellen.id 20210824232002_01677
utue.personen.roh Wolter, Silke
utue.personen.roh Linek, Julian
utue.personen.roh Altmann, Josepha
utue.personen.roh Weimann, Thomas
utue.personen.roh Bechstein, Sylke
utue.personen.roh Kleiner, Reinhold
utue.personen.roh Beyer, Jorn
utue.personen.roh Koelle, Dieter
utue.personen.roh Kieler, Oliver
dcterms.isPartOf.ZSTitelID Micromachines de_DE
dcterms.isPartOf.ZS-Issue Article 350 de_DE
dcterms.isPartOf.ZS-Volume 12 de_DE
utue.fakultaet 07 Mathematisch-Naturwissenschaftliche Fakultät de_DE


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