Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers

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Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers

Author: Wolter, Silke; Linek, Julian; Altmann, Josepha; Weimann, Thomas; Bechstein, Sylke; Kleiner, Reinhold; Beyer, Jorn; Koelle, Dieter; Kieler, Oliver
Tübinger Autor(en):
Linek, Julian
Kleiner, Reinhold
Kölle, Dieter
Published in: Micromachines (2021), Bd. 12, Article 350
Verlagsangabe: Mdpi
Language: English
Full text: http://dx.doi.org/10.3390/mi12040350
ISSN: 2072-666X
DDC Classifikation: 530 - Physics
540 - Chemistry and allied sciences
600 - Technology
Dokumentart: Artikel
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