An anisotropic dry etch process with fluorine chemistry to create well-defined titanium surfaces for biomedical studies

dc.contributor.author	Kern, Dieter P.
dc.contributor.author	Fleischer, Monika
dc.contributor.author	Löffler, Ronny
dc.date.accessioned	2014-03-07T12:12:01Z
dc.date.available	2014-03-07T12:12:01Z
dc.date.issued	2012
dc.identifier.issn	0167-9317
dc.identifier.uri	http://hdl.handle.net/10900/43129
dc.language.iso	en	de_DE
dc.publisher	Elsevier Science Bv	de_DE
dc.relation.uri	http://dx.doi.org/10.1016/j.mee.2012.05.039	de_DE
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject.ddc	530	de_DE
dc.subject.ddc	600	de_DE
dc.title	An anisotropic dry etch process with fluorine chemistry to create well-defined titanium surfaces for biomedical studies	de_DE
dc.type	Article	de_DE
utue.quellen.id	20140226071329_01170	de_DE
utue.publikation.seiten	361-364	de_DE
utue.personen.roh	Loeffler, R.
utue.personen.roh	Fleischer, M.
utue.personen.roh	Kern, D. P.
dcterms.isPartOf.ZSTitelID	Microelectronic Engineering	de_DE
dcterms.isPartOf.ZS-Volume	97	de_DE
utue.fakultaet	07 Mathematisch-Naturwissenschaftliche Fakultät	de_DE