| Author: | Jones, Peter D.; Mierzejewski, Michael | |
| Tübinger Autor(en): |
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| Published in: | Journal of Micromechanics and Microengineering (2025), Bd. 35 (4), Article 045003 | |
| Verlagsangabe: | Bristol : Iop Publishing Ltd | |
| Language: | English | |
| Full text: | http://dx.doi.org/10.1088/1361-6439/adba71 | |
| ISSN: | 0960-1317 | |
| DDC Classifikation: |
530 - Physics 600 - Technology |
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| Dokumentart: | Article | |
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