High-precision contactless optical 3D-metrology of silicon sensors
Author:
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Lavrik, E.; Frankenfeld, U.; Mehta, S.; Schmidt, H. R.
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Tübinger Autor(en):
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Published in:
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Nuclear Instruments & Methods in Physics Research Section A - Accelerators Spectrometers Detectors and Associated Equipment
(2019), Bd.
935,
S.
167-172
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Verlagsangabe:
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Elsevier Science Bv
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Language:
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English
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Full text:
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http://dx.doi.org/10.1016/j.nima.2019.04.039
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ISSN:
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1872-9576
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DDC Classifikation:
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530 - Physics 600 - Technology
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Dokumentart:
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Article
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