High-precision contactless optical 3D-metrology of silicon sensors

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High-precision contactless optical 3D-metrology of silicon sensors

Author: Lavrik, E.; Frankenfeld, U.; Mehta, S.; Schmidt, H. R.
Tübinger Autor(en):
Lavrik, Evgeny
Mehta, Shaifali
Schmidt, Hans Rudolf
Published in: Nuclear Instruments & Methods in Physics Research Section A - Accelerators Spectrometers Detectors and Associated Equipment (2019), Bd. 935, S. 167-172
Verlagsangabe: Elsevier Science Bv
Language: English
Full text: http://dx.doi.org/10.1016/j.nima.2019.04.039
ISSN: 1872-9576
DDC Classifikation: 530 - Physics
600 - Technology
Dokumentart: Article
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